9 results
Origami MEMS and NEMS
- John Rogers, Yonggang Huang, Oliver G. Schmidt, David H. Gracias
-
- Journal:
- MRS Bulletin / Volume 41 / Issue 2 / February 2016
- Published online by Cambridge University Press:
- 11 February 2016, pp. 123-129
- Print publication:
- February 2016
-
- Article
-
- You have access Access
- HTML
- Export citation
-
In a manner reminiscent of macroscale bending and folding techniques such as origami, the out-of-plane assembly of lithographically micro- and nanopatterned thin films, can be used to fabricate three-dimensional (3D) micro- and nanostructured devices. These 3D devices, including microelectronic circuits, sensors, antennas, metamaterials, robotic, and biomimetic constructs, enable new functionalities and are challenging to fabricate by other methods. In this article, we summarize important features of this set of techniques and the devices assembled thereof, with a focus on functional constructs that have been formed by bending, folding, or buckling. At small size scales, manipulation using manual or even wired probes face daunting practical challenges in terms of cost, scalability, and high-throughput manufacturability; hence we emphasize techniques that manipulate strain in thin films so that they can spontaneously assemble into programmed 3D geometries without the need for any wires or probes.
Origami-Inspired 3D Assembly of Egg-Crate Shaped Metamaterials Using Stress and Surface Tension Forces
- Joyce Breger, Dongyeon Helen Shin, Kate Malachowski, Shivendra Pandey, David H. Gracias
-
- Journal:
- MRS Advances / Volume 1 / Issue 24 / 2016
- Published online by Cambridge University Press:
- 21 December 2015, pp. 1743-1748
- Print publication:
- 2016
-
- Article
- Export citation
-
We discuss the self-folding of patterned metallic sheets using both differential stress and surface forces. The advantageous characteristics of the technique include, (a) The creation of 3D patterned corrugated metamaterials with pattern resolution limited only by that of planar lithography. Since planar lithography is highly versatile, a variety of patterns with different sizes and shapes can be formed. (b) The hands-free and wire-free self-folding of these materials use two orthogonal forces derived from the release of residual stress and the minimization of surface tension. Hence, this process is highly parallel and scalable allowing such materials to be mass produced. (c) Finally, the edges of the materials self-align and seal due to capillary forces of the liquid hinges—this self-sealing enhances overall rigidity and strength of the materials.
Consequently, the self-folding of patterned and sealed “egg-crate” shaped metamaterials was realized. Patterns were incorporated in the form of “smart” patches on the walls of the egg-crates which can be selectively functionalized with biomolecules. Apart from the intellectual appeal of these hands-free, self-sealing materials, we envision applicability of these egg-crate like microstructures in lab-on-a-chip assays as functionalized microwells and as light weight mechanical metamaterials.
Contributors
-
- By Mitchell Aboulafia, Frederick Adams, Marilyn McCord Adams, Robert M. Adams, Laird Addis, James W. Allard, David Allison, William P. Alston, Karl Ameriks, C. Anthony Anderson, David Leech Anderson, Lanier Anderson, Roger Ariew, David Armstrong, Denis G. Arnold, E. J. Ashworth, Margaret Atherton, Robin Attfield, Bruce Aune, Edward Wilson Averill, Jody Azzouni, Kent Bach, Andrew Bailey, Lynne Rudder Baker, Thomas R. Baldwin, Jon Barwise, George Bealer, William Bechtel, Lawrence C. Becker, Mark A. Bedau, Ernst Behler, José A. Benardete, Ermanno Bencivenga, Jan Berg, Michael Bergmann, Robert L. Bernasconi, Sven Bernecker, Bernard Berofsky, Rod Bertolet, Charles J. Beyer, Christian Beyer, Joseph Bien, Joseph Bien, Peg Birmingham, Ivan Boh, James Bohman, Daniel Bonevac, Laurence BonJour, William J. Bouwsma, Raymond D. Bradley, Myles Brand, Richard B. Brandt, Michael E. Bratman, Stephen E. Braude, Daniel Breazeale, Angela Breitenbach, Jason Bridges, David O. Brink, Gordon G. Brittan, Justin Broackes, Dan W. Brock, Aaron Bronfman, Jeffrey E. Brower, Bartosz Brozek, Anthony Brueckner, Jeffrey Bub, Lara Buchak, Otavio Bueno, Ann E. Bumpus, Robert W. Burch, John Burgess, Arthur W. Burks, Panayot Butchvarov, Robert E. Butts, Marina Bykova, Patrick Byrne, David Carr, Noël Carroll, Edward S. Casey, Victor Caston, Victor Caston, Albert Casullo, Robert L. Causey, Alan K. L. Chan, Ruth Chang, Deen K. Chatterjee, Andrew Chignell, Roderick M. Chisholm, Kelly J. Clark, E. J. Coffman, Robin Collins, Brian P. Copenhaver, John Corcoran, John Cottingham, Roger Crisp, Frederick J. Crosson, Antonio S. Cua, Phillip D. Cummins, Martin Curd, Adam Cureton, Andrew Cutrofello, Stephen Darwall, Paul Sheldon Davies, Wayne A. Davis, Timothy Joseph Day, Claudio de Almeida, Mario De Caro, Mario De Caro, John Deigh, C. F. Delaney, Daniel C. Dennett, Michael R. DePaul, Michael Detlefsen, Daniel Trent Devereux, Philip E. Devine, John M. Dillon, Martin C. Dillon, Robert DiSalle, Mary Domski, Alan Donagan, Paul Draper, Fred Dretske, Mircea Dumitru, Wilhelm Dupré, Gerald Dworkin, John Earman, Ellery Eells, Catherine Z. Elgin, Berent Enç, Ronald P. Endicott, Edward Erwin, John Etchemendy, C. Stephen Evans, Susan L. Feagin, Solomon Feferman, Richard Feldman, Arthur Fine, Maurice A. Finocchiaro, William FitzPatrick, Richard E. Flathman, Gvozden Flego, Richard Foley, Graeme Forbes, Rainer Forst, Malcolm R. Forster, Daniel Fouke, Patrick Francken, Samuel Freeman, Elizabeth Fricker, Miranda Fricker, Michael Friedman, Michael Fuerstein, Richard A. Fumerton, Alan Gabbey, Pieranna Garavaso, Daniel Garber, Jorge L. A. Garcia, Robert K. Garcia, Don Garrett, Philip Gasper, Gerald Gaus, Berys Gaut, Bernard Gert, Roger F. Gibson, Cody Gilmore, Carl Ginet, Alan H. Goldman, Alvin I. Goldman, Alfonso Gömez-Lobo, Lenn E. Goodman, Robert M. Gordon, Stefan Gosepath, Jorge J. E. Gracia, Daniel W. Graham, George A. Graham, Peter J. Graham, Richard E. Grandy, I. Grattan-Guinness, John Greco, Philip T. Grier, Nicholas Griffin, Nicholas Griffin, David A. Griffiths, Paul J. Griffiths, Stephen R. Grimm, Charles L. Griswold, Charles B. Guignon, Pete A. Y. Gunter, Dimitri Gutas, Gary Gutting, Paul Guyer, Kwame Gyekye, Oscar A. Haac, Raul Hakli, Raul Hakli, Michael Hallett, Edward C. Halper, Jean Hampton, R. James Hankinson, K. R. Hanley, Russell Hardin, Robert M. Harnish, William Harper, David Harrah, Kevin Hart, Ali Hasan, William Hasker, John Haugeland, Roger Hausheer, William Heald, Peter Heath, Richard Heck, John F. Heil, Vincent F. Hendricks, Stephen Hetherington, Francis Heylighen, Kathleen Marie Higgins, Risto Hilpinen, Harold T. Hodes, Joshua Hoffman, Alan Holland, Robert L. Holmes, Richard Holton, Brad W. Hooker, Terence E. Horgan, Tamara Horowitz, Paul Horwich, Vittorio Hösle, Paul Hoβfeld, Daniel Howard-Snyder, Frances Howard-Snyder, Anne Hudson, Deal W. Hudson, Carl A. Huffman, David L. Hull, Patricia Huntington, Thomas Hurka, Paul Hurley, Rosalind Hursthouse, Guillermo Hurtado, Ronald E. Hustwit, Sarah Hutton, Jonathan Jenkins Ichikawa, Harry A. Ide, David Ingram, Philip J. Ivanhoe, Alfred L. Ivry, Frank Jackson, Dale Jacquette, Joseph Jedwab, Richard Jeffrey, David Alan Johnson, Edward Johnson, Mark D. Jordan, Richard Joyce, Hwa Yol Jung, Robert Hillary Kane, Tomis Kapitan, Jacquelyn Ann K. Kegley, James A. Keller, Ralph Kennedy, Sergei Khoruzhii, Jaegwon Kim, Yersu Kim, Nathan L. King, Patricia Kitcher, Peter D. Klein, E. D. Klemke, Virginia Klenk, George L. Kline, Christian Klotz, Simo Knuuttila, Joseph J. Kockelmans, Konstantin Kolenda, Sebastian Tomasz Kołodziejczyk, Isaac Kramnick, Richard Kraut, Fred Kroon, Manfred Kuehn, Steven T. Kuhn, Henry E. Kyburg, John Lachs, Jennifer Lackey, Stephen E. Lahey, Andrea Lavazza, Thomas H. Leahey, Joo Heung Lee, Keith Lehrer, Dorothy Leland, Noah M. Lemos, Ernest LePore, Sarah-Jane Leslie, Isaac Levi, Andrew Levine, Alan E. Lewis, Daniel E. Little, Shu-hsien Liu, Shu-hsien Liu, Alan K. L. Chan, Brian Loar, Lawrence B. Lombard, John Longeway, Dominic McIver Lopes, Michael J. Loux, E. J. Lowe, Steven Luper, Eugene C. Luschei, William G. Lycan, David Lyons, David Macarthur, Danielle Macbeth, Scott MacDonald, Jacob L. Mackey, Louis H. Mackey, Penelope Mackie, Edward H. Madden, Penelope Maddy, G. B. Madison, Bernd Magnus, Pekka Mäkelä, Rudolf A. Makkreel, David Manley, William E. Mann (W.E.M.), Vladimir Marchenkov, Peter Markie, Jean-Pierre Marquis, Ausonio Marras, Mike W. Martin, A. P. Martinich, William L. McBride, David McCabe, Storrs McCall, Hugh J. McCann, Robert N. McCauley, John J. McDermott, Sarah McGrath, Ralph McInerny, Daniel J. McKaughan, Thomas McKay, Michael McKinsey, Brian P. McLaughlin, Ernan McMullin, Anthonie Meijers, Jack W. Meiland, William Jason Melanson, Alfred R. Mele, Joseph R. Mendola, Christopher Menzel, Michael J. Meyer, Christian B. Miller, David W. Miller, Peter Millican, Robert N. Minor, Phillip Mitsis, James A. Montmarquet, Michael S. Moore, Tim Moore, Benjamin Morison, Donald R. Morrison, Stephen J. Morse, Paul K. Moser, Alexander P. D. Mourelatos, Ian Mueller, James Bernard Murphy, Mark C. Murphy, Steven Nadler, Jan Narveson, Alan Nelson, Jerome Neu, Samuel Newlands, Kai Nielsen, Ilkka Niiniluoto, Carlos G. Noreña, Calvin G. Normore, David Fate Norton, Nikolaj Nottelmann, Donald Nute, David S. Oderberg, Steve Odin, Michael O’Rourke, Willard G. Oxtoby, Heinz Paetzold, George S. Pappas, Anthony J. Parel, Lydia Patton, R. P. Peerenboom, Francis Jeffry Pelletier, Adriaan T. Peperzak, Derk Pereboom, Jaroslav Peregrin, Glen Pettigrove, Philip Pettit, Edmund L. Pincoffs, Andrew Pinsent, Robert B. Pippin, Alvin Plantinga, Louis P. Pojman, Richard H. Popkin, John F. Post, Carl J. Posy, William J. Prior, Richard Purtill, Michael Quante, Philip L. Quinn, Philip L. Quinn, Elizabeth S. Radcliffe, Diana Raffman, Gerard Raulet, Stephen L. Read, Andrews Reath, Andrew Reisner, Nicholas Rescher, Henry S. Richardson, Robert C. Richardson, Thomas Ricketts, Wayne D. Riggs, Mark Roberts, Robert C. Roberts, Luke Robinson, Alexander Rosenberg, Gary Rosenkranz, Bernice Glatzer Rosenthal, Adina L. Roskies, William L. Rowe, T. M. Rudavsky, Michael Ruse, Bruce Russell, Lilly-Marlene Russow, Dan Ryder, R. M. Sainsbury, Joseph Salerno, Nathan Salmon, Wesley C. Salmon, Constantine Sandis, David H. Sanford, Marco Santambrogio, David Sapire, Ruth A. Saunders, Geoffrey Sayre-McCord, Charles Sayward, James P. Scanlan, Richard Schacht, Tamar Schapiro, Frederick F. Schmitt, Jerome B. Schneewind, Calvin O. Schrag, Alan D. Schrift, George F. Schumm, Jean-Loup Seban, David N. Sedley, Kenneth Seeskin, Krister Segerberg, Charlene Haddock Seigfried, Dennis M. Senchuk, James F. Sennett, William Lad Sessions, Stewart Shapiro, Tommie Shelby, Donald W. Sherburne, Christopher Shields, Roger A. Shiner, Sydney Shoemaker, Robert K. Shope, Kwong-loi Shun, Wilfried Sieg, A. John Simmons, Robert L. Simon, Marcus G. Singer, Georgette Sinkler, Walter Sinnott-Armstrong, Matti T. Sintonen, Lawrence Sklar, Brian Skyrms, Robert C. Sleigh, Michael Anthony Slote, Hans Sluga, Barry Smith, Michael Smith, Robin Smith, Robert Sokolowski, Robert C. Solomon, Marta Soniewicka, Philip Soper, Ernest Sosa, Nicholas Southwood, Paul Vincent Spade, T. L. S. Sprigge, Eric O. Springsted, George J. Stack, Rebecca Stangl, Jason Stanley, Florian Steinberger, Sören Stenlund, Christopher Stephens, James P. Sterba, Josef Stern, Matthias Steup, M. A. Stewart, Leopold Stubenberg, Edith Dudley Sulla, Frederick Suppe, Jere Paul Surber, David George Sussman, Sigrún Svavarsdóttir, Zeno G. Swijtink, Richard Swinburne, Charles C. Taliaferro, Robert B. Talisse, John Tasioulas, Paul Teller, Larry S. Temkin, Mark Textor, H. S. Thayer, Peter Thielke, Alan Thomas, Amie L. Thomasson, Katherine Thomson-Jones, Joshua C. Thurow, Vzalerie Tiberius, Terrence N. Tice, Paul Tidman, Mark C. Timmons, William Tolhurst, James E. Tomberlin, Rosemarie Tong, Lawrence Torcello, Kelly Trogdon, J. D. Trout, Robert E. Tully, Raimo Tuomela, John Turri, Martin M. Tweedale, Thomas Uebel, Jennifer Uleman, James Van Cleve, Harry van der Linden, Peter van Inwagen, Bryan W. Van Norden, René van Woudenberg, Donald Phillip Verene, Samantha Vice, Thomas Vinci, Donald Wayne Viney, Barbara Von Eckardt, Peter B. M. Vranas, Steven J. Wagner, William J. Wainwright, Paul E. Walker, Robert E. Wall, Craig Walton, Douglas Walton, Eric Watkins, Richard A. Watson, Michael V. Wedin, Rudolph H. Weingartner, Paul Weirich, Paul J. Weithman, Carl Wellman, Howard Wettstein, Samuel C. Wheeler, Stephen A. White, Jennifer Whiting, Edward R. Wierenga, Michael Williams, Fred Wilson, W. Kent Wilson, Kenneth P. Winkler, John F. Wippel, Jan Woleński, Allan B. Wolter, Nicholas P. Wolterstorff, Rega Wood, W. Jay Wood, Paul Woodruff, Alison Wylie, Gideon Yaffe, Takashi Yagisawa, Yutaka Yamamoto, Keith E. Yandell, Xiaomei Yang, Dean Zimmerman, Günter Zoller, Catherine Zuckert, Michael Zuckert, Jack A. Zupko (J.A.Z.)
- Edited by Robert Audi, University of Notre Dame, Indiana
-
- Book:
- The Cambridge Dictionary of Philosophy
- Published online:
- 05 August 2015
- Print publication:
- 27 April 2015, pp ix-xxx
-
- Chapter
- Export citation
Self-folding thin-film materials: From nanopolyhedra to graphene origami
- Vivek B. Shenoy, David H. Gracias
-
- Journal:
- MRS Bulletin / Volume 37 / Issue 9 / September 2012
- Published online by Cambridge University Press:
- 12 September 2012, pp. 847-854
- Print publication:
- September 2012
-
- Article
- Export citation
-
Self-folding of thin films is a more deterministic form of self-assembly wherein structures curve or fold up either spontaneously on release from the substrate or in response to specific stimuli. From an intellectual standpoint, the study of the self-folding of thin films at small size scales is motivated by the observation that a large number of naturally occurring materials such as leaves and tissues show curved, wrinkled, or folded micro- and nanoscale geometries. From a technological standpoint, such a self-assembly methodology is important since it can be used to transform the precision of existing planar patterning methods, such as electron-beam lithography, to the third dimension. Also, the self-folding of graphene promises a means to create a variety of three-dimensional carbon-based micro- and nanostructures. Finally, stimuli responsive self-folding can be used to realize chemomechanical and tether-free actuation at small size scales. Here, we review theoretical and experimental aspects of the self-folding of metallic, semiconducting, and polymeric films.
Capillary And Magnetic Forces For Microscale Self-Assembled Systems
- Christopher J. Morris, Kate E. Laflin, Brian Isaacson, Michael Grapes, David Gracias
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1272 / 2010
- Published online by Cambridge University Press:
- 01 February 2011, 1272-OO02-07
- Print publication:
- 2010
-
- Article
- Export citation
-
Self-assembly is a promising technique to overcome fundamental limitations with integrating, packaging, and generally handling individual electronic-related components with characteristic lengths significantly smaller than 1 mm. Here we briefly summarize the use of capillary and magnetic forces to realize two example microscale systems. In the first example, we use capillary forces from a low melting point solder alloy to integrate 500 μm square, 100 μm thick silicon chips with thermally and chemically sensitive metal-polymer hinge actuators, for potential medical applications. The second example demonstrates a path towards self-assembling 3-D silicon circuits formed out of 280 μm sized building blocks, utilizing both capillary forces from a low melting point solder alloy and magnetic forces from integrated, permanent magnets. In the latter example, the utilization of magnetic forces combined with capillary forces improved the assembly yield to 7.8% over 0.1% achieved previously with capillary forces alone.
A Three Dimensional Self-folding Package (SFP) for Electronics
- David Gracias, Jeong-Hyun Cho, Steve Hu
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1249 / 2010
- Published online by Cambridge University Press:
- 01 February 2011, 1249-F09-07
- Print publication:
- 2010
-
- Article
- Export citation
-
We describe the concept of a 3D self-folding package (SFP) for sensors and electronic devices. The strategy is based on a self-assembly strategy wherein 2D panels interconnected with hinges spontaneously fold-up when they are released from the substrate; self-folding can be triggered by temperature or selected chemicals. The strategy enables packaging of devices in porous polyhedral geometries that can either be untethered or substrate-bound. Self-folding can enable packaging of devices in small 3D form factors and may enable efficient cooling due to porosity. The utilization of this self-folding platform to enable 3D packaging of cantilever sensors and magnetic field sensitive strain gauges is summarized.
Fabrication and Applications of Three Dimensional Porous Microwells
- Christina L Randall, Yevgeniy V Kalinin, Anum Azam, David Gracias
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1272 / 2010
- Published online by Cambridge University Press:
- 01 February 2011, 1272-KK10-03
- Print publication:
- 2010
-
- Article
- Export citation
-
In many biological applications, such as cell therapy and drug delivery, there is a need to enhance diffusion by enabling chemical transport in all three dimensions. We highlight this need by comparing diffusion in a conventional two-dimensional (2D) microwell with diffusion in a three-dimensional (3D) cubic microwell using numerical simulations. We also describe the fabrication of hollow polymeric (and biocompatible) cubic microwells and microwell arrays. We emphasize that since the assembly process is compatible with 2D lithographic patterning, porosity can be precisely patterned in all three dimensions. Hence, this platform provides considerable versatility for a variety of applications.
A Facile Method for Patterning Substrates with Zinc Oxide Nanowires
- Jeong-Hyun Cho, Elizabeth W Cha, David Gracias
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1174 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1174-V07-01
- Print publication:
- 2009
-
- Article
- Export citation
-
Conventional growth of zinc oxide (ZnO) nanowires (NWs) is typically carried out using vapor liquid solid (VLS) and chemical vapor deposition (CVD) methods. While these methods are effective, they often involve the use of specialty gasses and equipment. We have discovered that ZnO NWs grow spontaneously from zinc (Zn) films (thermally evaporated on silicon (Si) substrates) when the films are merely heated on a hot-plate in air at ambient pressures for 10 minutes. This process does not involve any metal catalysts, seed layers, specialty gasses or surface treatments in forming patterned regions (on silicon substrates) of NWs with typical diameters in the range of 20-50 nm and lengths of 2-3 μm.
Tetherless, 3D, Micro-Nanoscale Tools and Devices for Lab on a Chip Applications
- David H Gracias
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1191 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1191-OO02-02
- Print publication:
- 2009
-
- Article
- Export citation
-
On the macroscale, a laboratory scientist uses a large number of tools such as flasks, crucibles, spatulas, filter funnels, test tube holders and grippers. If laboratory procedures are to be miniaturized within chips, micro and nanoscale analogs of these macroscopic tools could provide enhanced functionality. In this paper, I describe research efforts in our group aimed at engineering three dimensional, tetherless and lithographically patterned miniaturized structures for lab on a chip applications.